By Harland G. Tompkins
A User's consultant to Ellipsometry will allow readers to maneuver past constrained turn-key functions of ellipsometers. as well as its finished discussions of the size of movie thickness and optical constants in movie, it additionally considers the trajectories of the ellipsometric parameters Del and Psi and the way adjustments in fabrics have an effect on parameters. This quantity additionally addresses using polysilicon, a cloth regularly hired within the microelectronics undefined, and the results of substrate roughness. 3 appendices offer beneficial references.
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Additional resources for A User's Guide to Ellipsometry
One should note that very near the null, the change in intensity as a function of angle is very small. In addition, near the null, the light level null angular position of polarizer Figure 2-9. The null can be located more accurately if angular measurements are made on both sides of the null at equal intensity. The null is the average angular value. Instrumentation 30 is very low and noise considerations can sometimes be a problem. Since the curve is symmetric about the null, another way to find the null is to read the angle on both sides of the null at equal intensities and then take the average.
Two iterations were sufficient to obtain values with accuracy commensurate with the rest of the study. It is estimated that the uncer tainty in the zero-thickness point should cause no more than a 30 Ä error in the thickness value obtained. The following section discusses the determination of the index of refraction of the film. In addition, a third method of obtaining the filmfree Del/Psi point will also be included. 1 Description of the Materials for the Example The example20 we will use to illustrate the method of determining the complex index of refraction is the oxidation of the pseudoalloy Ti:W.
6 Figure 2-9 shows a plot of the intensity of the light near a null. One should note that very near the null, the change in intensity as a function of angle is very small. In addition, near the null, the light level null angular position of polarizer Figure 2-9. The null can be located more accurately if angular measurements are made on both sides of the null at equal intensity. The null is the average angular value. Instrumentation 30 is very low and noise considerations can sometimes be a problem.
A User's Guide to Ellipsometry by Harland G. Tompkins