Download e-book for kindle: A User's Guide to Ellipsometry by Harland G. Tompkins

By Harland G. Tompkins

ISBN-10: 0126939500

ISBN-13: 9780126939507

This textual content on optics for graduate scholars explains the best way to make sure fabric homes and parameters for inaccessible substrates and unknown motion pictures in addition to the right way to degree super skinny movies. Its 14 case stories illustrate ideas and strengthen purposes of ellipsometry — relatively on the subject of the semiconductor and to stories related to corrosion and oxide growth.
A User's consultant to Ellipsometry will allow readers to maneuver past constrained turn-key functions of ellipsometers. as well as its finished discussions of the size of movie thickness and optical constants in movie, it additionally considers the trajectories of the ellipsometric parameters Del and Psi and the way adjustments in fabrics have an effect on parameters. This quantity additionally addresses using polysilicon, a cloth regularly hired within the microelectronics undefined, and the results of substrate roughness. 3 appendices offer beneficial references.

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One should note that very near the null, the change in intensity as a function of angle is very small. In addition, near the null, the light level null angular position of polarizer Figure 2-9. The null can be located more accurately if angular measurements are made on both sides of the null at equal intensity. The null is the average angular value. Instrumentation 30 is very low and noise considerations can sometimes be a problem. Since the curve is symmetric about the null, another way to find the null is to read the angle on both sides of the null at equal intensities and then take the average.

Two iterations were sufficient to obtain values with accuracy commensurate with the rest of the study. It is estimated that the uncer­ tainty in the zero-thickness point should cause no more than a 30 Ä error in the thickness value obtained. The following section discusses the determination of the index of refraction of the film. In addition, a third method of obtaining the filmfree Del/Psi point will also be included. 1 Description of the Materials for the Example The example20 we will use to illustrate the method of determining the complex index of refraction is the oxidation of the pseudoalloy Ti:W.

6 Figure 2-9 shows a plot of the intensity of the light near a null. One should note that very near the null, the change in intensity as a function of angle is very small. In addition, near the null, the light level null angular position of polarizer Figure 2-9. The null can be located more accurately if angular measurements are made on both sides of the null at equal intensity. The null is the average angular value. Instrumentation 30 is very low and noise considerations can sometimes be a problem.

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A User's Guide to Ellipsometry by Harland G. Tompkins


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